摘要:本次课题实验研究采用JGP-450型多靶磁控溅射仪制备了一系列的不同C含量的ZrCN复合薄膜。通过利用X射线衍射仪、扫描电子显微镜及能谱仪、摩擦磨损实验机、纳米压痕实验仪等实验仪器对这一系列ZrCN复合薄膜的微观结构，力学性能和摩擦磨损性能进行初步的研究。实验结果表明：C含量对ZrCN复合薄膜的微观结构，相组成，摩擦磨损性能，力学性能等众多方面都有着重要的影响。不同C含量的ZrCN复合薄膜有着不同的性能差异。ZrCN复合薄膜中存在的相主要是(200)面ZrN和(111)面ZrN。随着含C量的增加，ZrCN复合薄膜中ZrN相在39°左右的(200)晶面的衍射峰逐渐宽化变弱而消失，在34°左右的(111)晶面的衍射峰变宽变弱，也呈现逐渐消失的趋势。同时，随着C含量的增加，ZrCN复合薄膜得晶粒尺寸逐渐减小。ZrCN复合薄膜的硬度也伴随着C含量的增加而逐渐降低，但摩擦磨损性能呈现逐步提升的趋势，摩擦系数呈现大幅降低的趋势，摩擦系数在含C量为32.35%时降至最低的0.3902。本次实验课题研究的ZrCN复合薄膜，由于随着复合薄膜中C含量的增加，硬度与弹性模量呈现逐步降低的趋势，而摩擦磨损性能随着C含量的增加呈现不断提升的趋势。硬度值与摩擦磨损性能都是复合薄膜中较为重要的性能要求。综合考虑，可以在满足具体客观需求的硬度值下，选择含C量较高的ZrCN复合薄膜，从而达到最优的性能要求。

关键字：ZrCN复合薄膜；力学性能；摩擦磨损；结构

Abstract:In this paper, a series of ZrCN composite films with different C contents were prepared by JGP-450 multi-target magnetron sputtering apparatus. The microstructures, mechanical properties and friction and wear properties of this series of ZrCN composite films were studied by X-ray diffraction, scanning electron microscopy and energy dispersive spectrometer, friction and wear tester, nanoindentation tester and other experimental instruments. The experimental results show that the C content has an important effect on the microstructure, phase composition, friction and wear properties, mechanical properties and other aspects of ZrCN composite films. The ZrCN composite films with different C contents have different performance differences. The ZrCN composite films are mainly (200) plane ZrN and (111) plane ZrN. With the increase of the amount of C, the diffraction peak of ZrN phase in the ZrCN composite film is weakened at about 39 °, and the diffraction peak of the (111) crystal plane at 34 ° is widened Weakened, but also showed a gradual disappearance of the trend. At the same time, with the increase of C content, the grain size of ZrCN composite film decreases gradually. The friction coefficient of ZrCN composite film is decreasing with the increase of C content, but the friction and wear properties tend to increase gradually. The friction coefficient decreases greatly, and the friction coefficient decreases to 0.3902 when the C content is 32.35%. The tensile strength and elastic modulus of the ZrCN composite films with the increase of C content in the composite films show a tendency to decrease with the increase of C content. Hardness value and friction and wear properties are composite film is more important performance requirements. Considering that the ZrCN composite films with higher C content can be selected under the hardness value satisfying the specific objective demand, the optimum performance requirements can be achieved.

Key words： ZrCN film；mechanical properties；friction and wear；structure

目录

第一章绪论 1

1.1引言 1

1.2薄膜的制备技术 1

1.2.1薄膜技术的发展 1

1.2.2薄膜的制备 2

1.2.3硬化方式 2

1.3摩擦磨损 3

1.3.1摩擦磨损定义 4

1.3.2摩擦的类别 4

1.3.3磨损的分类 4

1.4研究现状与发展 5

1.5选题意义与研究内容 6