摘要:运用JGP-450型多靶磁控溅射仪来改变Al靶功率制备铝元素含量有差别的TiAlN复合薄膜样品。通过X射线衍射仪、扫描电镜、摩擦磨损仪等设备对样品进行实验。并得出其在微结构、力学性能以及摩擦磨损性能方面的结论。实验结果表明：TiAlN复合膜沿TiN(111)衍射峰择优生长；当Al原子百分含量为8.01%、14.88%和15.98%时，随着Al原子百分含量的增加，(111)衍射峰强度逐渐减小，向大角度偏移，出现新的衍射峰TiN(222)，当Al含量为19.88at.%时，(111)衍射峰偏移的角度变小，新相AlN引起了这一现象。TiN的初始硬度为17.21GPa，随着Al元素含量的增加，当Al原子百分含量在0-8.01%时显著提升。当Al含量为8.01at.%时，硬度达到最大值21.12GPa。而Al元素含量继续上升，在8.01at.%到19.88at.%之间时，TiAlN复合薄膜的硬度开始缓慢下降。TiN薄膜的摩擦系数为0.6223。Al元素含量不断增加过程中，TiAlN复合膜的摩擦系数先降后升。在Al元素含量在0-15.98at.%时，随着Al元素含量的增加，薄膜的摩擦系数在逐渐降低，历经0.4873、0.4596，在Al元素含量为15.98at.%时，薄膜的摩擦系数达到最小值为0.4256；随着Al元素含量的继续增大，摩擦系数的值开始回升，在Al元素含量在19.88at.%时，最终升高到0.5148。

关键词：磁控溅射；TiAlN复合薄膜；力学性能；摩擦磨损性能

Abstract:TiAlN composite film samples with different content of aluminum (Al) elements were prepared by using JGP-450 type multi-target magnetron sputtering device to change the power of Al target. The samples were tested by means of X ray diffractometer, scanning electron microscope and friction and wear tester. The results of microstructure, mechanical properties and friction and wear properties are obtained. The experimental results show that the TiAlN composite membrane along the TiN (111) diffraction peak of preferential growth; when the Al concentration was 8.01%, 14.88% and 15.98%, with the increase of Al concentration, (111) the diffraction peak intensity decreases gradually shifted to high angle, diffraction peak of TiN (222), new when the Al content is 19.88 at%, (111) diffraction peak offset angle becomes smaller, the new phase AlN caused this phenomenon. The initial hardness of TiN is 17.21 GPa, and when the content of Al element increases, the percentage of Al atom increases remarkably when it is 0-8.01%. When the Al content is 8.01 at%, the hardness reaches the maximum value of 21.12 GPa. While the content of Al element continues to rise, the hardness of TiAlN composite film starts to decrease slowly between 8.01 at% and 19.88 at%. The friction coefficient of TiN film is 0.6223. With the increase of Al content, the friction coefficient of TiAlN composite film decreased and then increased. In the content of Al in 0-15.98 at%, with the increase of Al content, the friction coefficient of the films decreased gradually after 0.4873, 0.4596, in the content of Al is 15.98 at%, the friction coefficient of the film reaches a minimum value of 0.4256; with the content of Al increases, the friction coefficient values began to rise in the content of Al in 19.88 at%, eventually increased to 0.5148.

Keywords: magnetron sputtering; TiAlN composite film; mechanical properties; friction and wear properties

目录

第一章绪论 1

1.1引言 1

1.2表面涂层技术的研究历程 1

1.3硬质薄膜的研究和进展 2

1.4纳米复合膜 3

1.4.1纳米复合膜的基本概念及分类 3

1.4.2纳米复合膜的研究现状 3

1.4.3纳米复合膜的致硬机理研究 4

1.5摩擦与磨损理论基础 5

1.5.1摩擦 5

1.5.2影响摩擦的因素 5

1.5.3磨损 8

1.6TIALN复合膜的结构特点及研究现状 9

1.6.1TiAlN复合膜的结构 9

1.6.2TiAlN复合膜的特点 9

1.6.3TiAlN复合膜的研究现状 10

1.7课题的研究目的和主要研究内容 10

1.7.1课题的研究目的及意义 10