摘要：本文章使用固相反应法制备Pb0.92Sr0.06Ba0.02(Mg1/3Nb2/3)0.25Ti0.40Zr0.35O3 (简称为 PMN-PZT陶瓷)，并探索不同烧结温度对其性能的影响。其在1250℃下烧结具有良好的电学性能，压电系数d33达690 pC/N，居里温度约为200℃。但由于其烧结温度过高，故而我们在PMN-PZT陶瓷基础上，添加少量CuO作为烧结助剂对其做进一步的低温烧结研究。实验结果显示CuO的加入明显地降低了陶瓷的烧结温度。向其添加0.7wt% CuO之后，其最优烧结温度低至900℃以下，烧结温度降低了近400度，并且其依然具有高达630 pC/N的压电常数，并且在40kV/cm的电场下能实现0.28%的应变。

使用掺杂0.7wt% CuO的PMN-PZT陶瓷粉末制成浆料在流延机上制成流延生片，采用堆叠法低温共烧工艺制备多层压电陶瓷微位移致动器。通过对工艺参数的改进，最终得到压电单元与银层之间良好结合，在光学显微镜可视范围内无大的缺陷的驱动器件。压电单元厚度均匀具有良好的性能，其最大位移量可达总长度的0.1%以上。并且具有较大的推力，在其允许的最大驱动电压下，横截面为7.3×10.0 mm的驱动器可以产生约3kN的推力

关键词：PMN-PZT压电陶瓷，CuO掺杂，低温共烧，压电陶瓷精密驱动器件。

毕业设计说明书外文摘要

Title   A piezoelectric stacking material and its precision driving device

Abstract：In this paper,Pb0.92Sr0.06Ba0.02(Mg1/3Nb2/3)0.25Ti0.40Zr0.35O3 (PMN-PZT）piezoelectric ceramics were prepared by solid state reaction method. The influence of different sintering temperature on the properties was investigated. Its sintering at 1250 ℃ has good electrical properties with d33 up to 690 pC/N, Curie temperature is about 200 ℃. However, due to its sintering temperature is too high, so we PMN-PZT ceramic based on the addition of a small amount of CuO as a sintering aid to further its low temperature sintering study. The experimental results show that the addition of CuO significantly reduces the sintering temperature of the ceramics. After adding 0.7 wt% CuO to it, the optimum sintering temperature is as low as 900℃, the sintering temperature is reduced by nearly 400 degrees, and it still has a piezoelectric constant up to 630 pC/N, and at an electric field of 40 kV / cm Can achieve 0.28% of the strain.

The co - firing process with silver electrode at 900 ℃was investigated, and the silver electrode was well conductive. These excellent properties make it have great potential in the preparation of large displacement multilayer stacked piezoelectric ceramic brakes. A PMN-PZT ceramic powder doped with 0.7 wt% CuO was used to prepare a slurry on a castor, and a multilayer piezoelectric ceramic micro-displacement actuator was prepared by a stacking method. Through the improvement of the process parameters, and finally get the piezoelectric unit and the silver layer between the good combination, in the optical microscope visible range without significant defects in the drive device. Piezoelectric unit thickness uniformity with good performance, the maximum displacement of up to 0.1% of the total length. And with a large thrust, a drive with a cross-section of 7.3 x 10.0 mm can produce a thrust of about 3kN at its maximum allowable drive voltage.

Keywords  PMN-PZT piezoelectric ceramics,CuO adding,low temperature co-fired, multilayer piezoelectric ceramic actuator

目  录

1  引言 1

1.1压电材料的种类 1

1.1.1无铅压电陶瓷 1

1.1.2 含铅压电材料 2

1.2.2铅基压电陶瓷低温烧结的意义 3

1.3 工艺及设备介绍 4

1.3.1 球磨 4

1.3.2 流延工艺 4

1.4 堆叠型压电陶瓷精密驱动器件 5

1.4.1 压电陶瓷精密驱动器件应用及市场 5

1.4.2 多层压电陶瓷微位移驱动器的结构 6

1.4.3 多层压电陶瓷微位移致动器的制备工艺 7

1.5 本文的研究意义及内容 7