摘要：采用反应磁控溅射法制备不同Y含量的Ti-Y-O-N薄膜，研究薄膜的微观结构，力学性能，摩擦磨损性能。实验表明：当Y含量小于7.8at.%时，薄膜呈面心立方(face-centeredcubic,fcc)，薄膜为Ti-Y-N固溶体；当Y含量继续增加时，薄膜呈面心立方和非晶两种形态，薄膜是Ti-Y-N和Y2O3的混合相。随Y含量的增加，促使晶粒细化，同时薄膜中出现大量晶界。当Y含量从0at.%升高到10.2at.%时，薄膜硬度从21GPa升高到26GPa；当Y含量高于10.2at.%时，薄膜硬度保持稳定。影响薄膜硬度的因素有非晶Y2O3相、固溶强化、晶界和残余应力。当Y含量介于0at.%〜7.8at.%之间，断裂韧性(KIC)上升缓慢。当Y含量为10.2at.%时，非晶Y2O3相的形成使KIC急剧上升至0.85MPa•m1/2。随Y含量进一步增加，KIC再次缓慢上升。薄膜的Y含量小于7.8at.%时，其平均摩擦系数(μ)和磨损率受负载影响很大，增加负载可使平均摩擦系数(μ)和磨损率显著升高。薄膜中Y含量的进一步增加，提高了摩擦性能和平均摩擦系数(μ)，而磨损率几乎与负载无关。因此可通过提高负载能力和摩擦磨损性能增强断裂韧性。

关键词：反应磁控溅射；Ti-Y-O-N薄膜；断裂韧性；摩擦磨损性能

Abstract：In  this  paper,  yttrium  was  incorporated  into  titanium  nitride  matrix  to  deposit  Ti-Y-O- N  films  using a  reactive  magnetron   sputtering  system  and   the   microstructure, mechanical and tribological properties were investigated. The  results  showed  that solid  solution face centered cubic (face-centered cubic, fcc) Ti-Y-N was the major phase of the  film  when the yttrium content was less than 7.8  at.%.  When  the  yttrium  content  was  further  increased, the film exhibited mixed phases  of  (face-centered  cubic, fcc)Ti-Y-N  and  amorphous  yttrium oxide, this induced  grain  refinement  and  appearance  of lots  of grain  boundaries.  Hardness of the films  first rose from 21 GPa at 0 at.% Y to 26 GPa at 10.2 at.% Y,  and remained   stable as the yttrium content was above 10.2 at.%. The hardness was influenced by the amorphous yttrium oxide phase, solid  solution  strengthening,  grain  boundaries and  residual  stress. Between 0 at. % to 7.8 at.% of yttrium, the fracture toughness (KIC) rose  slowly,  KIC  rose sharply to 0.85 MPa·m1/2 as the yttrium content was 10.2 at.% due to the formation  of amorphous yttrium oxide  phase,  it  rose  slowly  again  with  a  further  increase in yttrium content. For the film at<7.8 at.%Y, average friction  coefficient  (μ)  and  wear  rate were influenced by the load significantly and there was  an  obvious  rise  in  their  values  with an increase in load. A further increase in yttrium content in the films, improved the tribological properties, μ and wear rate were almost independent on the load. Fracture  toughness enhancement   attributed   to the  improved  load  capacity  and tribological properties.

Keywords: reactive magnetron sputtering, Ti-Y-O-N films, fracture toughness, tribological  properties

目 录

第一章 绪论 1

1.1引言 1

1.2硬质薄膜的研究发展 1

1.2.1超硬薄膜 1

1.2.2纳米多层膜 2

1.2.3纳米结构复合膜 2

1.3薄膜的摩擦磨损理论 3

1.3.1摩擦的概念和分类 3

1.3.2影响摩擦的因素 3

1.3.3薄膜的磨损 4

1.4薄膜制备的方法 4

1.4.1溅射原理 5

1.4.2直流溅射 6

1.4.3射频溅射 7

1.4.4磁控溅射 7

1.4.5反应溅射 8